13MM Series Stainless Steel Pressure Sensors
Honeywell 13V Series stainless steel pressure sensors are designed for Ultra High Purity (UHP) applications that involve measurement of gases and liquid flow in harsh environments.
The rugged, media-isolated package pressure sensor uses the Honeywell-proven piezoresistive semiconductor sensor chip in an oil-isolated housing. This design has proven to be highly reliable, stable, and accurate. Designed with a SEMI F20-compatible ring and diaphragm, this sensor exhibits exceptional corrosion resistance and is specifically designed to withstand the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes. Its robust construction ensures protection against environmental factors while maintaining accurate pressure measurements.
The 13V pressure sensor is designed to minimize the offset drift under prolonged vacuum conditions, making it an ideal choice for critical industrial applications where measurement accuracy and material integrity are crucial. These sensors feature a weld-ring collar and special back support ring for high cycle life capability, as they are designed for further package integration in OEM (Original Equipment Manufacturer) applications.
Features
- 500 psia1
- SEMI F20 compatible
- Rugged, isolated stainless steel package
Applications
- Semiconductor equipment
- Integrated Gas Systems (IGS)
- Process control gas
- Mass flow controller
- Liquid flow monitoring
- Solar panels
- Displays/Instrumentation
- Medical equipment
